Surface roughness modelling with neural networks

• Main Authors: PATRIKAR, Rajendra M., RAMANATHAN, Kiruthika, ZHUANG, Wenjun
• Format: text
• Language: English
• Published: Institutional Knowledge at Singapore Management University 2002
• Subjects: Databases and Information Systems; OS and Networks
• Online Access: https://ink.library.smu.edu.sg/sis_research/7427
• Institution: Singapore Management University

Accurate surface modelling has become important in the modem integrated circuits manufacturing technology. On all the real surfaces microscopic roughness appears, which affects many electronic properties of the material, which in turn decides the yield and reliability of the integrated circuits. The...