Robust design for etching process parameters of hard disk drive slider fabrication using data mining and multi response optimization

Robust design for etching process parameters of hard disk drive slider fabrication using data mining and multi response optimization

This paper is to provide a proper insight into solving a multi-response optimization problem using hybrid response surface methodology (RSM) based on robust parameter design (RPD) concepts and data mining (DM) for the multi-response optimization of a RIE process. Over the recent years in many high p...

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書目詳細資料
Main Authors:	Holimchayachotikul,P., Leksakul,K., Guizzi,G.
格式:	Article
出版:	World Scientific and Engineering Academy and Society 2015
主題:	Artificial Intelligence Control and Systems Engineering Mathematics (all)
在線閱讀:	http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=79961044870&origin=inward http://cmuir.cmu.ac.th/handle/6653943832/38982
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Chiang Mai University

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