Robust design for etching process parameters of hard disk drive slider fabrication using data mining and multi response optimization
This paper is to provide a proper insight into solving a multi-response optimization problem using hybrid response surface methodology (RSM) based on robust parameter design (RPD) concepts and data mining (DM) for the multi-response optimization of a RIE process. Over the recent years in many high p...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
World Scientific and Engineering Academy and Society
2015
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| Subjects: | |
| Online Access: | http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=79961044870&origin=inward http://cmuir.cmu.ac.th/handle/6653943832/38982 |
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| Institution: | Chiang Mai University |