Robust design for etching process parameters of hard disk drive slider fabrication using data mining and multi response optimization

• Main Authors: Holimchayachotikul,P., Leksakul,K., Guizzi,G.
• 格式: Article
• 出版: World Scientific and Engineering Academy and Society 2015
• 主題: Artificial Intelligence; Control and Systems Engineering; Mathematics (all)
• 在線閱讀: http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=79961044870&origin=inward; http://cmuir.cmu.ac.th/handle/6653943832/38982
• 機構: Chiang Mai University

This paper is to provide a proper insight into solving a multi-response optimization problem using hybrid response surface methodology (RSM) based on robust parameter design (RPD) concepts and data mining (DM) for the multi-response optimization of a RIE process. Over the recent years in many high p...