Optimization of diamond-like carbon thin film on copper substrate for carbon nanotubes synthesis by ACVD technique
© 2017 Trans Tech Publications, Switzerland. In this research, demonstrate plasma treatment on copper substrate by Radio Frequency Plasma (RF) using a mixture of 70%C 2 H 2 + 30%H 2 as the working gases. The plasma exposure time were varied from 10, 20 and 30 min under the electrical power of 50 W...
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| Main Authors: | , , , |
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| Format: | Book Series |
| Published: |
2017
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85011360809&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/40866 |
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| Institution: | Chiang Mai University |
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