Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film

© 2017 Elsevier Ltd. All rights reserved. Hydroxyapatite (HA) and Titanium (Ti) thin film was fabricated by a pulsed DC magnetron sputtering technique. To synthesize a thin film that compatible with bone cell, optimize parameter of the sputtering process and study of the film properties were carried...

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Main Authors: P. Premphet, M. Prasoetsri, D. Boonyawan, R. Supruangnet, S. Udomsom, K. Leksakul
Format: Conference Proceeding
Published: 2018
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http://cmuir.cmu.ac.th/jspui/handle/6653943832/46984
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Institution: Chiang Mai University
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spelling th-cmuir.6653943832-469842018-04-25T07:30:54Z Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film P. Premphet M. Prasoetsri D. Boonyawan R. Supruangnet S. Udomsom K. Leksakul Agricultural and Biological Sciences © 2017 Elsevier Ltd. All rights reserved. Hydroxyapatite (HA) and Titanium (Ti) thin film was fabricated by a pulsed DC magnetron sputtering technique. To synthesize a thin film that compatible with bone cell, optimize parameter of the sputtering process and study of the film properties were carried out. The response surface method (RSM) has been applied in this work and there are 3 considering factors: pressure, power level and a distance between target and substrate. The experiment was conducted by a physical property testing to determine young's modulus and layer components. The result showed that the differentiation of components and film thickness were related to a variation of a surface coating time. A structure of the film was performed by Atomic Force Microscope (AFM) and X-ray Photoelectron Spectroscopy (XPS). The analysis showed that HA-TiO 2 film was synthesized in sputtering process and the young's modulus of the film was higher value compared to the bone. Finally, the result of biological property testing proved that HA-TiO 2 film had a bio-compatible property and UV light affect the TiO 2 composition to be a toxic with bone cell. 2018-04-25T07:07:38Z 2018-04-25T07:07:38Z 2017-01-01 Conference Proceeding 22147853 2-s2.0-85028403612 10.1016/j.matpr.2017.06.141 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85028403612&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/46984
institution Chiang Mai University
building Chiang Mai University Library
country Thailand
collection CMU Intellectual Repository
topic Agricultural and Biological Sciences
spellingShingle Agricultural and Biological Sciences
P. Premphet
M. Prasoetsri
D. Boonyawan
R. Supruangnet
S. Udomsom
K. Leksakul
Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film
description © 2017 Elsevier Ltd. All rights reserved. Hydroxyapatite (HA) and Titanium (Ti) thin film was fabricated by a pulsed DC magnetron sputtering technique. To synthesize a thin film that compatible with bone cell, optimize parameter of the sputtering process and study of the film properties were carried out. The response surface method (RSM) has been applied in this work and there are 3 considering factors: pressure, power level and a distance between target and substrate. The experiment was conducted by a physical property testing to determine young's modulus and layer components. The result showed that the differentiation of components and film thickness were related to a variation of a surface coating time. A structure of the film was performed by Atomic Force Microscope (AFM) and X-ray Photoelectron Spectroscopy (XPS). The analysis showed that HA-TiO 2 film was synthesized in sputtering process and the young's modulus of the film was higher value compared to the bone. Finally, the result of biological property testing proved that HA-TiO 2 film had a bio-compatible property and UV light affect the TiO 2 composition to be a toxic with bone cell.
format Conference Proceeding
author P. Premphet
M. Prasoetsri
D. Boonyawan
R. Supruangnet
S. Udomsom
K. Leksakul
author_facet P. Premphet
M. Prasoetsri
D. Boonyawan
R. Supruangnet
S. Udomsom
K. Leksakul
author_sort P. Premphet
title Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film
title_short Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film
title_full Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film
title_fullStr Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film
title_full_unstemmed Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film
title_sort optimization of dc magnetron sputtering deposition process and surface properties of ha-tio<inf>2</inf> film
publishDate 2018
url https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85028403612&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/46984
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