Optimization of DC magnetron sputtering deposition process and surface properties of HA-TiO<inf>2</inf> film
© 2017 Elsevier Ltd. All rights reserved. Hydroxyapatite (HA) and Titanium (Ti) thin film was fabricated by a pulsed DC magnetron sputtering technique. To synthesize a thin film that compatible with bone cell, optimize parameter of the sputtering process and study of the film properties were carried...
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Main Authors: | , , , , , |
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Format: | Conference Proceeding |
Published: |
2018
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Subjects: | |
Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85028403612&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/46984 |
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Institution: | Chiang Mai University |
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