Nitrogen doping for adhesion improvement of DLC film deposited on Si substrate by Filtered Cathodic Vacuum Arc (FCVA) technique

• Main Authors: Bootkul D., Supsermpol B., Saenphinit N., Aramwit C., Intarasiri S.
• Format: Article
• Language: English
• Published: Elsevier 2014
• Online Access: http://www.scopus.com/inward/record.url?eid=2-s2.0-84903314909&partnerID=40&md5=42a17eb7cc0e36bb798fe895110a4551; http://cmuir.cmu.ac.th/handle/6653943832/4780
• Institution: Chiang Mai University

Diamond-like carbon (DLC) films have been used in many applications due to their attractive combination of properties including chemical inertness, corrosion protection, biocompatibility, high hardness, and low wear rates. However, they still have some limitations such as high internal stresses and...