Formation of thin DLC films on SiO<inf>2</inf>/Si substrate using FCVAD technique
Diamond-like carbon (DLC) films deposited on SiO 2 /Si substrate are attractive for novel sensitive and selective chemical sensors. According to the almost never ending of size reduction, a nm-thickness layer of the film is greatly required. However, formation of such a very thin DLC film on SiO 2 /...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Journal |
| Published: |
2018
|
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84885191214&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/48290 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Chiang Mai University |
Be the first to leave a comment!