Formation of thin DLC films on SiO<inf>2</inf>/Si substrate using FCVAD technique
Diamond-like carbon (DLC) films deposited on SiO 2 /Si substrate are attractive for novel sensitive and selective chemical sensors. According to the almost never ending of size reduction, a nm-thickness layer of the film is greatly required. However, formation of such a very thin DLC film on SiO 2 /...
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Main Authors: | D. Bootkul, S. Intarasiri, C. Aramwit, U. Tippawan, L. D. Yu |
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Format: | Journal |
Published: |
2018
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Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84885191214&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/48290 |
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Institution: | Chiang Mai University |
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