Investigation of the use of rotating linearly polarized light for characterizing SiO<inf>2</inf> thin-film on Si substrate

This research is based on the Fresnel's equations and the ellipsometric technique that investigate the sample of SiO2 thinfilm on Si substrate. The investigation is made by a probing beam which is in the form of a rotating linearly polarized light generated by the polarizing Mach-Zehnder interf...

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Bibliographic Details
Main Authors: C. Pawong, R. Chitaree, C. Soankwan
Other Authors: Mahidol University
Format: Conference or Workshop Item
Published: 2018
Subjects:
Online Access:https://repository.li.mahidol.ac.th/handle/123456789/12836
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Institution: Mahidol University