Investigation of the use of rotating linearly polarized light for characterizing SiO<inf>2</inf> thin-film on Si substrate
This research is based on the Fresnel's equations and the ellipsometric technique that investigate the sample of SiO2 thinfilm on Si substrate. The investigation is made by a probing beam which is in the form of a rotating linearly polarized light generated by the polarizing Mach-Zehnder interf...
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Main Authors: | , , |
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Format: | Conference or Workshop Item |
Published: |
2018
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Online Access: | https://repository.li.mahidol.ac.th/handle/123456789/12836 |
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Institution: | Mahidol University |