Fabrication techniques for an arrayed EIS biosensor
Electrolyte-Insulator-Semiconductor (EIS) based biosensors are generally exposed to liquid media that contain biological or chemical entities of specific interest. Such sensors measure change in electrical parameters such as capacitance when charged species attach to the insulator layer. It is commo...
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Main Authors: | , |
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Format: | Conference Proceeding |
Published: |
2018
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Subjects: | |
Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=77950957378&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/49067 |
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Institution: | Chiang Mai University |