TiO2 based nanocrystalline thin film gas sensors prepared by ion-assisted electron beam evaporation

• المؤلفون الرئيسيون: Wisitsoraat A., Comini E., Sberveglieri G., Wlodarski W., Tuantranont A.
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2014
• الوصول للمادة أونلاين: http://www.scopus.com/inward/record.url?eid=2-s2.0-34548130037&partnerID=40&md5=c18084d5bd06b6435c236e18d8319960; http://cmuir.cmu.ac.th/handle/6653943832/5205

In this work, we develop TiO2 based nanocrystalline thin films prepared by ion-assisted ebeam evaporation process. N-type and p-type TiO 2 gassensing layers have been deposited by doping with various metal oxide materials including WO3, MoO3, and NiOx. Structural and morphological characterization b...