TiO2 based nanocrystalline thin film gas sensors prepared by ion-assisted electron beam evaporation
In this work, we develop TiO2 based nanocrystalline thin films prepared by ion-assisted ebeam evaporation process. N-type and p-type TiO 2 gassensing layers have been deposited by doping with various metal oxide materials including WO3, MoO3, and NiOx. Structural and morphological characterization b...
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| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34548130037&partnerID=40&md5=c18084d5bd06b6435c236e18d8319960 http://cmuir.cmu.ac.th/handle/6653943832/5205 |
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| Institution: | Chiang Mai University |
| Language: | English |