TiO<inf>2</inf> based nanocrystalline thin film gas sensors prepared by ion-assisted electron beam evaporation
In this work, we develop TiO2 based nanocrystalline thin films prepared by ion-assisted ebeam evaporation process. N-type and p-type TiO 2 gassensing layers have been deposited by doping with various metal oxide materials including WO3, MoO3, and NiOx. Structural and morphological characterization b...
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| Main Authors: | , , , , |
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| Format: | Conference Proceeding |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=34548130037&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/60983 |
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| Institution: | Chiang Mai University |