A tapered glass microcapillary processing system for focusing a MeV H+ ion beam

• Main Authors: Somrit Unai, Michael W. Rhodes, Chanvit Sriprom, Kanda Singkarat, Nirut Pussadee, Somsorn Singkarat
• 格式: 雜誌
• 出版: 2018
• 主題: Biochemistry, Genetics and Molecular Biology; Chemistry; Materials Science; Mathematics; Physics and Astronomy
• 在線閱讀: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84888117665&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/52186

Several recent reports have indicated that a tapered glass capillary tube with a tip size on the order of micrometers has a focusing effect on transmitted ion beams. In relation to our particular area of interest, this could be a simple and cheap way to generate a focused ion beam for ion beam litho...