A tapered glass microcapillary processing system for focusing a MeV H+ ion beam

Several recent reports have indicated that a tapered glass capillary tube with a tip size on the order of micrometers has a focusing effect on transmitted ion beams. In relation to our particular area of interest, this could be a simple and cheap way to generate a focused ion beam for ion beam litho...

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Bibliographic Details
Main Authors: Somrit Unai, Michael W. Rhodes, Chanvit Sriprom, Kanda Singkarat, Nirut Pussadee, Somsorn Singkarat
Format: Journal
Published: 2018
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84888117665&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/47478
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Institution: Chiang Mai University