A tapered glass microcapillary processing system for focusing a MeV H+ ion beam

Several recent reports have indicated that a tapered glass capillary tube with a tip size on the order of micrometers has a focusing effect on transmitted ion beams. In relation to our particular area of interest, this could be a simple and cheap way to generate a focused ion beam for ion beam litho...

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Main Authors: Somrit Unai, Michael W. Rhodes, Chanvit Sriprom, Kanda Singkarat, Nirut Pussadee, Somsorn Singkarat
Format: Journal
Published: 2018
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84888117665&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/47478
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Institution: Chiang Mai University
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spelling th-cmuir.6653943832-474782018-04-25T08:40:32Z A tapered glass microcapillary processing system for focusing a MeV H+ ion beam Somrit Unai Michael W. Rhodes Chanvit Sriprom Kanda Singkarat Nirut Pussadee Somsorn Singkarat Several recent reports have indicated that a tapered glass capillary tube with a tip size on the order of micrometers has a focusing effect on transmitted ion beams. In relation to our particular area of interest, this could be a simple and cheap way to generate a focused ion beam for ion beam lithography and beam-in-air analysis and irradiation applications. Here, details of the method and the equipment used to produce a tapered glass microcapillary tube will be described. The equipment, which is simply called a "glass microcapillary puller", is made using an induction heater. This method ensures that the glass tube, which is inserted inside and along the central axis of the solenoid, is heated uniformly in all directions. The heating temperature is adjusted by a power control, with a maximum temperature of approximately 2,000°C. The pulling tension is varied over a wide range by using different weights. Application of the tapered glass microcapillary for 2 MeV H + ion beam lithography is also demonstrated. 2018-04-25T08:40:32Z 2018-04-25T08:40:32Z 2013-11-27 Journal 01252526 2-s2.0-84888117665 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84888117665&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/47478
institution Chiang Mai University
building Chiang Mai University Library
country Thailand
collection CMU Intellectual Repository
description Several recent reports have indicated that a tapered glass capillary tube with a tip size on the order of micrometers has a focusing effect on transmitted ion beams. In relation to our particular area of interest, this could be a simple and cheap way to generate a focused ion beam for ion beam lithography and beam-in-air analysis and irradiation applications. Here, details of the method and the equipment used to produce a tapered glass microcapillary tube will be described. The equipment, which is simply called a "glass microcapillary puller", is made using an induction heater. This method ensures that the glass tube, which is inserted inside and along the central axis of the solenoid, is heated uniformly in all directions. The heating temperature is adjusted by a power control, with a maximum temperature of approximately 2,000°C. The pulling tension is varied over a wide range by using different weights. Application of the tapered glass microcapillary for 2 MeV H + ion beam lithography is also demonstrated.
format Journal
author Somrit Unai
Michael W. Rhodes
Chanvit Sriprom
Kanda Singkarat
Nirut Pussadee
Somsorn Singkarat
spellingShingle Somrit Unai
Michael W. Rhodes
Chanvit Sriprom
Kanda Singkarat
Nirut Pussadee
Somsorn Singkarat
A tapered glass microcapillary processing system for focusing a MeV H+ ion beam
author_facet Somrit Unai
Michael W. Rhodes
Chanvit Sriprom
Kanda Singkarat
Nirut Pussadee
Somsorn Singkarat
author_sort Somrit Unai
title A tapered glass microcapillary processing system for focusing a MeV H+ ion beam
title_short A tapered glass microcapillary processing system for focusing a MeV H+ ion beam
title_full A tapered glass microcapillary processing system for focusing a MeV H+ ion beam
title_fullStr A tapered glass microcapillary processing system for focusing a MeV H+ ion beam
title_full_unstemmed A tapered glass microcapillary processing system for focusing a MeV H+ ion beam
title_sort tapered glass microcapillary processing system for focusing a mev h+ ion beam
publishDate 2018
url https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84888117665&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/47478
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