A tapered glass microcapillary processing system for focusing a MeV H+ ion beam
Several recent reports have indicated that a tapered glass capillary tube with a tip size on the order of micrometers has a focusing effect on transmitted ion beams. In relation to our particular area of interest, this could be a simple and cheap way to generate a focused ion beam for ion beam litho...
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| Main Authors: | , , , , , |
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| Format: | Journal |
| Published: |
2018
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84888117665&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/47478 |
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| Institution: | Chiang Mai University |