Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

• المؤلفون الرئيسيون: Puttaraksa,N., Unai,S., Rhodes,M.W., Singkarat,K., Whitlow,H.J., Singkarat,S.
• التنسيق: Conference or Workshop Item
• منشور في: Elsevier 2015
• الموضوعات: Nuclear and High Energy Physics; Instrumentation
• الوصول للمادة أونلاين: http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84655170025&origin=inward; http://cmuir.cmu.ac.th/handle/6653943832/38611
• المؤسسة: Chiang Mai University

In this study, poly(methyl methacrylate) (PMMA) was investigated as a negative resist by irradiation with a high-fluence 2 MeV proton beam. The beam from a 1.7 MV Tandetron accelerator at the Plasma and Beam Physics Research Facility (PBP) of Chiang Mai University is shaped by a pair of computer-con...