Programmable proximity aperture lithography with MeV ion beams
A novel MeV ion beam programmable proximity aperture lithography system has been constructed at the Accelerator Laboratory of the University of Jyväskylä, Finland. This facility can be used to fabricate three dimensional microstructures in thick (<100 μm) polymer resist such as polymethylmethacry...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2014
|
| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-53349156593&partnerID=40&md5=a8a4aaf80fd86905698a14e95e1f6890 http://cmuir.cmu.ac.th/handle/6653943832/5464 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Chiang Mai University |
| Language: | English |