Programmable proximity aperture lithography with MeV ion beams

by Puttaraksa N., Gorelick S., Sajavaara T., Laitinen M., Singkarat S., Whitlow H.J.
Published 2014

Fabrication of microfluidic devices using MeV ion beam Programmable Proximity Aperture Lithography (PPAL)

by Gorelick S., Puttaraksa N., Sajavaara T., Laitinen M., Singkarat S., Whitlow H.J.
Published 2014

Lithography exposure characteristics of poly(methyl methacrylate) (PMMA) for carbon, helium and hydrogen ions

by Puttaraksa N., Norarat R., Laitinen M., Sajavaara T., Singkarat S., Whitlow H.J.
Published 2014

Direct writing of channels for microfluidics in silica by MeV ion beam lithography

by Puttaraksa N., Napari M., Chienthavorn O., Norarat R., Sajavaara T., Laitinen M., Singkarat S., Whitlow H.J.
Published 2014

Investigation of multi-resolution support for MeV ion microscopy imaging

by Whitlow, H.J., Norarat, R., Sajavaara, T., Laitinen, M., Ranttila, K., Heikkinen, P., Hänninen, V., Rossi, M., Jones, P., Timonen, J., Gilbert, L.K., Marjomäki, V., Ren, M., Van Kan, J.A., Osipowicz, T., Watt, F.
Published 2014