Programmable proximity aperture lithography with MeV ion beams

by Puttaraksa N., Gorelick S., Sajavaara T., Laitinen M., Singkarat S., Whitlow H.J.
Published 2014

Fabrication of microfluidic devices using MeV ion beam Programmable Proximity Aperture Lithography (PPAL)

by Gorelick S., Puttaraksa N., Sajavaara T., Laitinen M., Singkarat S., Whitlow H.J.
Published 2014

Lithography exposure characteristics of poly(methyl methacrylate) (PMMA) for carbon, helium and hydrogen ions

by Puttaraksa N., Norarat R., Laitinen M., Sajavaara T., Singkarat S., Whitlow H.J.
Published 2014

Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

by Puttaraksa N., Unai S., Rhodes M.W., Singkarat K., Whitlow H.J., Singkarat S.
Published 2014

Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

by Puttaraksa N., Unai S., Rhodes M.W., Singkarat K., Whitlow H.J., Singkarat S.
Published 2014

Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

by Puttaraksa,N., Unai,S., Rhodes,M.W., Singkarat,K., Whitlow,H.J., Singkarat,S.
Published 2015

Influence of MeV H + ion beam flux on cross-linking and blister formation in PMMA resist

by Unai S., Puttaraksa N., Pussadee N., Singkarat K., Rhodes M., Whitlow H., Singkarat S.
Published 2017

Development of procedures for programmable proximity aperture lithography

by Whitlow H.J., Gorelick S., Puttaraksa N., Napari M., Hokkanen M.J., Norarat R.
Published 2014

Fast and blister-free irradiation conditions for cross-linking of PMMA induced by 2 MeV protons

by Unai S., Puttaraksa N., Pussadee N., Singkarat K., Rhodes M.W., Whitlow H.J., Singkarat S.
Published 2014

Influence of MeV H + ion beam flux on cross-linking and blister formation in PMMA resist

by Unai S., Puttaraksa N., Pussadee N., Singkarat K., Rhodes M.W., Whitlow H.J., Singkarat S.
Published 2014

Fast and blister-free irradiation conditions for cross-linking of PMMA induced by 2 MeV protons

by Unai S., Puttaraksa N., Pussadee N., Singkarat K., Rhodes M.W., Whitlow H.J., Singkarat S.
Published 2014

Influence of MeV H + ion beam flux on cross-linking and blister formation in PMMA resist

by Unai S., Puttaraksa N., Pussadee N., Singkarat K., Rhodes M.W., Whitlow H.J., Singkarat S.
Published 2014

Development of economic MeV-ion microbeam technology at Chiang Mai University

by Singkarat S., Puttaraksa N., Unai S., Yu L., Singkarat K., Pussadee N., Whitlow H., Natyanum S., Tippawan U.
Published 2017

Direct writing of channels for microfluidics in silica by MeV ion beam lithography

by Puttaraksa N., Napari M., Chienthavorn O., Norarat R., Sajavaara T., Laitinen M., Singkarat S., Whitlow H.J.
Published 2014