Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography
In this study, poly(methyl methacrylate) (PMMA) was investigated as a negative resist by irradiation with a high-fluence 2 MeV proton beam. The beam from a 1.7 MV Tandetron accelerator at the Plasma and Beam Physics Research Facility (PBP) of Chiang Mai University is shaped by a pair of computer-con...
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| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
Elsevier
2015
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| Subjects: | |
| Online Access: | http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84655170025&origin=inward http://cmuir.cmu.ac.th/handle/6653943832/38611 |
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| Institution: | Chiang Mai University |