Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect

Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect

10.1088/0957-4484/15/1/040

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Bibliographic Details
Main Authors: Whitlow, H.J., Ng, M.L., Auzelyte, V., Maximov, I., Montelius, L., Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97076
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/97076

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