Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect

10.1088/0957-4484/15/1/040

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Bibliographic Details
Main Authors:	Whitlow, H.J., Ng, M.L., Auzelyte, V., Maximov, I., Montelius, L., Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97076
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-97076
record_format	dspace
spelling	sg-nus-scholar.10635-970762024-11-14T00:59:17Z Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect Whitlow, H.J. Ng, M.L. Auzelyte, V. Maximov, I. Montelius, L. Van Kan, J.A. Bettiol, A.A. Watt, F. PHYSICS 10.1088/0957-4484/15/1/040 Nanotechnology 15 1 223-226 NNOTE 2014-10-16T09:30:59Z 2014-10-16T09:30:59Z 2004-01 Article Whitlow, H.J., Ng, M.L., Auzelyte, V., Maximov, I., Montelius, L., Van Kan, J.A., Bettiol, A.A., Watt, F. (2004-01). Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect. Nanotechnology 15 (1) : 223-226. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/15/1/040 09574484 http://scholarbank.nus.edu.sg/handle/10635/97076 000188463600041 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0957-4484/15/1/040
author2	PHYSICS
author_facet	PHYSICS Whitlow, H.J. Ng, M.L. Auzelyte, V. Maximov, I. Montelius, L. Van Kan, J.A. Bettiol, A.A. Watt, F.
format	Article
author	Whitlow, H.J. Ng, M.L. Auzelyte, V. Maximov, I. Montelius, L. Van Kan, J.A. Bettiol, A.A. Watt, F.
spellingShingle	Whitlow, H.J. Ng, M.L. Auzelyte, V. Maximov, I. Montelius, L. Van Kan, J.A. Bettiol, A.A. Watt, F. Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
author_sort	Whitlow, H.J.
title	Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
title_short	Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
title_full	Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
title_fullStr	Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
title_full_unstemmed	Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
title_sort	lithography of high spatial density biosensor structures with sub-100 nm spacing by mev proton beam writing with minimal proximity effect
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97076
_version_	1821182134464806912

Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect

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