Local structure of indium oxynitride from x-ray absorption spectroscopy

Synchrotron x-ray absorption near edge structures (XANES) measurements of In L3 edge is used in conjunction with first principles calculations to characterize rf magnetron sputtered indium oxynitride at different O contents. Good agreement between the measured and the independently calculated spectr...

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Bibliographic Details
Main Authors: Thienprasert J.-T., Nukeaw J., Sungthong A., Porntheeraphat S., Singkarat S., Onkaw D., Rujirawat S., Limpijumnong S.
Format: Article
Language:English
Published: 2014
Online Access:http://www.scopus.com/inward/record.url?eid=2-s2.0-51849112331&partnerID=40&md5=42a1f611908445829f85cc61427281f3
http://cmuir.cmu.ac.th/handle/6653943832/5485
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Institution: Chiang Mai University
Language: English