Local structure of indium oxynitride from x-ray absorption spectroscopy
Synchrotron x-ray absorption near edge structures (XANES) measurements of In L3 edge is used in conjunction with first principles calculations to characterize rf magnetron sputtered indium oxynitride at different O contents. Good agreement between the measured and the independently calculated spectr...
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Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
2014
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Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-51849112331&partnerID=40&md5=42a1f611908445829f85cc61427281f3 http://cmuir.cmu.ac.th/handle/6653943832/5485 |
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Institution: | Chiang Mai University |
Language: | English |