Microstructure and interfaces of thin film capacitors on base metal foils
The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains wi...
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th-cmuir.6653943832-604072018-09-10T03:42:01Z Microstructure and interfaces of thin film capacitors on base metal foils T. Dechakupt G. Yang I. M. Reaney C. A. Randall S. Trolier-McKinstry Engineering The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains with grain size range of 24-75 nm (∼ 42 nm average). NiO was detected after re-oxidation by X-ray diffraction, but not by transmission electron microscopy, suggesting that the oxide is not a continuous barrier layer, but is spatially distributed in the films. Oxygen non-stoichiometry and the existence of C in barium titanate films were observed by electron energy loss spectrometry. In addition, it was found that there is a 5-8 nm thick Ni-Ba alloy developed at the interface between the barium titanate film and Ni foil. © 2008 Trans Tech Publications, Switzerland. 2018-09-10T03:42:01Z 2018-09-10T03:42:01Z 2008-12-01 Book Series 10226680 2-s2.0-62949247701 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=62949247701&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/60407 |
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Engineering T. Dechakupt G. Yang I. M. Reaney C. A. Randall S. Trolier-McKinstry Microstructure and interfaces of thin film capacitors on base metal foils |
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The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains with grain size range of 24-75 nm (∼ 42 nm average). NiO was detected after re-oxidation by X-ray diffraction, but not by transmission electron microscopy, suggesting that the oxide is not a continuous barrier layer, but is spatially distributed in the films. Oxygen non-stoichiometry and the existence of C in barium titanate films were observed by electron energy loss spectrometry. In addition, it was found that there is a 5-8 nm thick Ni-Ba alloy developed at the interface between the barium titanate film and Ni foil. © 2008 Trans Tech Publications, Switzerland. |
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Book Series |
author |
T. Dechakupt G. Yang I. M. Reaney C. A. Randall S. Trolier-McKinstry |
author_facet |
T. Dechakupt G. Yang I. M. Reaney C. A. Randall S. Trolier-McKinstry |
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T. Dechakupt |
title |
Microstructure and interfaces of thin film capacitors on base metal foils |
title_short |
Microstructure and interfaces of thin film capacitors on base metal foils |
title_full |
Microstructure and interfaces of thin film capacitors on base metal foils |
title_fullStr |
Microstructure and interfaces of thin film capacitors on base metal foils |
title_full_unstemmed |
Microstructure and interfaces of thin film capacitors on base metal foils |
title_sort |
microstructure and interfaces of thin film capacitors on base metal foils |
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2018 |
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https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=62949247701&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/60407 |
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