Microstructure and interfaces of thin film capacitors on base metal foils

The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains wi...

Full description

Saved in:
Bibliographic Details
Main Authors: T. Dechakupt, G. Yang, I. M. Reaney, C. A. Randall, S. Trolier-McKinstry
Format: Book Series
Published: 2018
Subjects:
Online Access:https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=62949247701&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/60407
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Chiang Mai University
id th-cmuir.6653943832-60407
record_format dspace
spelling th-cmuir.6653943832-604072018-09-10T03:42:01Z Microstructure and interfaces of thin film capacitors on base metal foils T. Dechakupt G. Yang I. M. Reaney C. A. Randall S. Trolier-McKinstry Engineering The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains with grain size range of 24-75 nm (∼ 42 nm average). NiO was detected after re-oxidation by X-ray diffraction, but not by transmission electron microscopy, suggesting that the oxide is not a continuous barrier layer, but is spatially distributed in the films. Oxygen non-stoichiometry and the existence of C in barium titanate films were observed by electron energy loss spectrometry. In addition, it was found that there is a 5-8 nm thick Ni-Ba alloy developed at the interface between the barium titanate film and Ni foil. © 2008 Trans Tech Publications, Switzerland. 2018-09-10T03:42:01Z 2018-09-10T03:42:01Z 2008-12-01 Book Series 10226680 2-s2.0-62949247701 https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=62949247701&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/60407
institution Chiang Mai University
building Chiang Mai University Library
country Thailand
collection CMU Intellectual Repository
topic Engineering
spellingShingle Engineering
T. Dechakupt
G. Yang
I. M. Reaney
C. A. Randall
S. Trolier-McKinstry
Microstructure and interfaces of thin film capacitors on base metal foils
description The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains with grain size range of 24-75 nm (∼ 42 nm average). NiO was detected after re-oxidation by X-ray diffraction, but not by transmission electron microscopy, suggesting that the oxide is not a continuous barrier layer, but is spatially distributed in the films. Oxygen non-stoichiometry and the existence of C in barium titanate films were observed by electron energy loss spectrometry. In addition, it was found that there is a 5-8 nm thick Ni-Ba alloy developed at the interface between the barium titanate film and Ni foil. © 2008 Trans Tech Publications, Switzerland.
format Book Series
author T. Dechakupt
G. Yang
I. M. Reaney
C. A. Randall
S. Trolier-McKinstry
author_facet T. Dechakupt
G. Yang
I. M. Reaney
C. A. Randall
S. Trolier-McKinstry
author_sort T. Dechakupt
title Microstructure and interfaces of thin film capacitors on base metal foils
title_short Microstructure and interfaces of thin film capacitors on base metal foils
title_full Microstructure and interfaces of thin film capacitors on base metal foils
title_fullStr Microstructure and interfaces of thin film capacitors on base metal foils
title_full_unstemmed Microstructure and interfaces of thin film capacitors on base metal foils
title_sort microstructure and interfaces of thin film capacitors on base metal foils
publishDate 2018
url https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=62949247701&origin=inward
http://cmuir.cmu.ac.th/jspui/handle/6653943832/60407
_version_ 1681425430138060800