Local structure of indium oxynitride from x-ray absorption spectroscopy
Synchrotron x-ray absorption near edge structures (XANES) measurements of In L3 edge is used in conjunction with first principles calculations to characterize rf magnetron sputtered indium oxynitride at different O contents. Good agreement between the measured and the independently calculated spectr...
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| Main Authors: | , , , , , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=51849112331&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/60732 |
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| Institution: | Chiang Mai University |