Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches
Au, Au-V solid solution, and Au-V2O5dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for t...
محفوظ في:
| المؤلفون الرئيسيون: | , , , |
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| التنسيق: | وقائع المؤتمر |
| منشور في: |
2018
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| الموضوعات: | |
| الوصول للمادة أونلاين: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=34247356929&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/61087 |
| الوسوم: |
إضافة وسم
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| المؤسسة: | Chiang Mai University |
| الملخص: | Au, Au-V solid solution, and Au-V2O5dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for the Au-V2O5films. Measurements of contact force and electrical contact resistance between pairs of Au or Au-V films show that increased hardness and resistivity in the alloy films results in higher contact resistance and less adhesion than in pure Au. These results imply that the Au-V2O5films may exhibit attractive behavior when used in a contact configuration, but this has not yet been tested. |
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