Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

• Main Authors: T. Bannuru, S. Narksitipan, W. L. Brown, R. P. Vinci
• Format: Conference Proceeding
• Published: 2018
• Subjects: Engineering; Physics and Astronomy
• Online Access: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=34247356929&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/61087
• Institution: Chiang Mai University

Au, Au-V solid solution, and Au-V2O5dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for the Au-V2O5films. Measurements of contact force and electrical contact resistance between pairs of Au or Au-V films show that increased hardness and resistivity in the alloy films results in higher contact resistance and less adhesion than in pure Au. These results imply that the Au-V2O5films may exhibit attractive behavior when used in a contact configuration, but this has not yet been tested.