Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

• المؤلفون الرئيسيون: T. Bannuru, S. Narksitipan, W. L. Brown, R. P. Vinci
• التنسيق: وقائع المؤتمر
• منشور في: 2018
• الموضوعات: Engineering; Physics and Astronomy
• الوصول للمادة أونلاين: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=34247356929&origin=inward; http://cmuir.cmu.ac.th/jspui/handle/6653943832/61087

Au, Au-V solid solution, and Au-V2O5dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for t...