Growth of multifunctional zirconium nitride thin films by reactive DC magnetron sputtering

Growth of multifunctional zirconium nitride thin films by reactive DC magnetron sputtering

Thesis (M.Sc.)--Chulalongkorn University, 2009

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Bibliographic Details
Main Author: Jirawan Saenton
Other Authors: Sukkaneste Tungasmita
Format: Theses and Dissertations
Language:English
Published: Chulalongkorn University 2012
Subjects:
Thin films
Silicon
Online Access:http://cuir.car.chula.ac.th/handle/123456789/20241
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Institution: Chulalongkorn University
Language: English
Description
Summary:Thesis (M.Sc.)--Chulalongkorn University, 2009

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