Growth of multifunctional zirconium nitride thin films by reactive DC magnetron sputtering
Thesis (M.Sc.)--Chulalongkorn University, 2009
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
Chulalongkorn University
2012
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| Online Access: | http://cuir.car.chula.ac.th/handle/123456789/20241 |
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| Institution: | Chulalongkorn University |
| Language: | English |