Effect of ion depth in low energy ion scattering Spectroscopy for evaluating nanostructures
In order to investigate the nanostructures, the spectroscopy technique providing the information on the top most layers or a few nanometer below the surface is required and the effect of ion depth in low energy ion scattering (LEIS) spectroscopy was investigated by Monte Carlo simulation. Helium ion...
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| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://repository.li.mahidol.ac.th/handle/123456789/24396 |
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| Institution: | Mahidol University |