Growth and structural characterizations of nanostructured chromium-zirconium-nitride thin films for tribological applications
Nanostructured Cr-Zr-N thin films were grown on Si(100) substrates in a mixture of Ar and N2 plasma. The nitrogen partial pressure was varied to produce and control the stoichiometric forms obtained. All the Cr-Zr-N films exhibited a nanostructure with an average grain size of less than 10 nm, as de...
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://repository.li.mahidol.ac.th/handle/123456789/29075 |
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| Institution: | Mahidol University |