Growth and structural characterizations of nanostructured chromium-zirconium-nitride thin films for tribological applications

• Main Authors: Pattira Homhuan, Surasing Chaiyakun, Rattaporn Thonggoom, Nurot Panich, Sukkaneste Tungasmita
• Other Authors: Chulalongkorn University
• Format: Article
• Published: 2018
• Subjects: Engineering; Materials Science; Physics and Astronomy
• Online Access: https://repository.li.mahidol.ac.th/handle/123456789/29075
• Institution: Mahidol University

Nanostructured Cr-Zr-N thin films were grown on Si(100) substrates in a mixture of Ar and N2 plasma. The nitrogen partial pressure was varied to produce and control the stoichiometric forms obtained. All the Cr-Zr-N films exhibited a nanostructure with an average grain size of less than 10 nm, as de...