Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

by Song, X., Yeap, K.B., Zhu, J., Belnoue, J., Sebastiani, M., Bemporad, E., Zeng, K., Korsunsky, A.M.
Published 2014

Residual stress measurement in thin films using the semi-destructive ring-core drilling method using Focused Ion Beam

by Song, X., Yeap, K.B., Zhu, J., Belnoue, J., Sebastiani, M., Bemporad, E., Zeng, K.Y., Korsunsky, A.M.
Published 2014