Thin dielectric films with low dielectric constants for quarter micron devices

by Chua, Chee Tee.
Published 2009

Method to reduce compressive stress in the silicon substrate during silicidation

by CHA, RANDALL CHER LIANG, CHUA, CHEE TEE, PEY, KIN LEONG, CHAN, LAP
Published 2012

Method to fabricate horizontal air columns underneath metal inductor

by CHAN, LAP, CHEW, KOK WAI JOHNNY, CHA, CHER LIANG, CHUA, CHEE TEE
Published 2012

Method to fabricate horizontal air columns underneath metal inductor

by CHAN, LAP, CHEW, KOK WAI JOHNNY, CHA, CHER LIANG, CHUA, CHEE TEE
Published 2012

Method of making spiral-type RF inductors having a high quality factor (Q)

by CHU, SHAU-FU SANFORD, CHEW, KOK WAI JOHNNY, CHUA, CHEE TEE, CHA, CHER LIANG
Published 2012