Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon

by Lau, W.S., Sane, V., Pey, K.S., Cronquist, B.
Published 2014

New low-voltage contrast mechanism to image local defects in very thin silicon dioxide films. True oxide electron beam induced current

by Lau, W.S., Chan, D.S.H., Phang, J.C.H., Chow, K.W., Pey, K.S., Lim, Y.P., Cronquist, B.
Published 2014

New low-voltage contrast mechanism to image local defects in very thin silicon dioxide films. True oxide electron beam induced current

by Lau, W.S., Chan, D.S.H., Phang, J.C.H., Chow, K.W., Pey, K.S., Lim, Y.P., Cronquist, B.
Published 2014

True oxide electron beam induced current for low-voltage imaging of local defects in very thin silicon dioxide films

by Lau, W.S., Chan, D.S.H., Phang, J.C.H., Chow, K.W., Pey, K.S., Lim, Y.P., Cronquist, B.
Published 2014

True oxide electron beam induced current for low-voltage imaging of local defects in very thin silicon dioxide films

by Lau, W.S., Chan, D.S.H., Phang, J.C.H., Chow, K.W., Pey, K.S., Lim, Y.P., Cronquist, B.
Published 2014

Quantitative imaging of local defects in very thin silicon dioxide films at low bias voltage by true oxide electron-beam-induced current

by Lau, W.S., Chan, D.S.H., Phang, J.C.H., Chow, K.W., Pey, K.S., Lim, Y.P., Sane, V., Cronquist, B.
Published 2014

Quantitative imaging of local defects in very thin silicon dioxide films at low bias voltage by true oxide electron-beam-induced current

by Lau, W.S., Chan, D.S.H., Phang, J.C.H., Chow, K.W., Pey, K.S., Lim, Y.P., Sane, V., Cronquist, B.
Published 2014

New type of local defects in very thin silicon dioxide films on arsenic-implanted p-type silicon

by Lau, W.S., Pey, K.S., Ng, W.T., Sane, V., Heng, J.M.C., Phang, J.C.H., Chan, D.S.H., Chua, C.M., Cronquist, B., Lee, Bob
Published 2014