Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon

10.1063/1.114807

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Bibliographic Details
Main Authors: Lau, W.S., Sane, V., Pey, K.S., Cronquist, B.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81314
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Institution: National University of Singapore