Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon

10.1063/1.114807

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Bibliographic Details
Main Authors:	Lau, W.S., Sane, V., Pey, K.S., Cronquist, B.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81314
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-813142023-10-30T22:53:36Z Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon Lau, W.S. Sane, V. Pey, K.S. Cronquist, B. ELECTRICAL ENGINEERING 10.1063/1.114807 Applied Physics Letters 67 2854- 2014-10-07T03:06:58Z 2014-10-07T03:06:58Z 1995 Article Lau, W.S., Sane, V., Pey, K.S., Cronquist, B. (1995). Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon. Applied Physics Letters 67 : 2854-. ScholarBank@NUS Repository. https://doi.org/10.1063/1.114807 00036951 http://scholarbank.nus.edu.sg/handle/10635/81314 A1995TC98500035 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.114807
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lau, W.S. Sane, V. Pey, K.S. Cronquist, B.
format	Article
author	Lau, W.S. Sane, V. Pey, K.S. Cronquist, B.
spellingShingle	Lau, W.S. Sane, V. Pey, K.S. Cronquist, B. Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon
author_sort	Lau, W.S.
title	Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon
title_short	Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon
title_full	Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon
title_fullStr	Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon
title_full_unstemmed	Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon
title_sort	two types of local oxide/substrate defects in very thin silicon dioxide films on silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81314
_version_	1781783982951628800

Two types of local oxide/substrate defects in very thin silicon dioxide films on silicon

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