Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication

بواسطة Ko, T.-M., Fan, M.-H., Cheng, A., Yu, R.
منشور في 2014

Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist

بواسطة Soo, C.P., Fan, M.H., Bourdillon, A.J., Chan, L.
منشور في 2014

Improvement on lithography pattern profile by plasma treatment

بواسطة Soo, C.P., Bourdillon, A.J., Valiyaveettil, S., Huan, A., Wee, A., Fan, M.H., Ang, T.C., Chan, L.H.
منشور في 2014

Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants

بواسطة Soo, C.P., Valiyaveettil, S., Huan, A., Wee, A., Ang, T.C., Fan, M.H., Bourdillon, A.J., Chan, L.H.
منشور في 2014