Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication

由 Ko, T.-M., Fan, M.-H., Cheng, A., Yu, R.
出版 2014

Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist

由 Soo, C.P., Fan, M.H., Bourdillon, A.J., Chan, L.
出版 2014

Improvement on lithography pattern profile by plasma treatment

由 Soo, C.P., Bourdillon, A.J., Valiyaveettil, S., Huan, A., Wee, A., Fan, M.H., Ang, T.C., Chan, L.H.
出版 2014

Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants

由 Soo, C.P., Valiyaveettil, S., Huan, A., Wee, A., Ang, T.C., Fan, M.H., Bourdillon, A.J., Chan, L.H.
出版 2014