Silicon surface passivation by aluminium oxide studied with electron energy loss spectroscopy

by Hoex, Bram, Bosman, Michel, Nandakumar, Naomi, Kessels, WMM
Published 2019

C-Si surface passivation by aluminum oxide studied with electron energy loss spectroscopy

by Hoex, B., Bosman, M., Nandakumar, N., Kessels, W.M.M.
Published 2014

On the c-Si surface passivation mechanism by the negative-charge-dielectric Al2 O3

by Hoex, B., Gielis, J.J.H., Van De Sanden, M.C.M., Kessels, W.M.M.
Published 2014

Surface passivation of phosphorus-diffused n +-type emitters by plasma-assisted atomic-layer deposited Al 2O 3

by Hoex, B., van de Sanden, M.C.M., Schmidt, J., Brendel, R., Kessels, W.M.M.
Published 2014

Surface passivation of phosphorus-diffused n +-type emitters by plasma-assisted atomic-layer deposited Al 2O 3

by Hoex, B., van de Sanden, M.C.M., Schmidt, J., Brendel, R., Kessels, W.M.M.
Published 2014

Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon

by Dingemans, G., Engelhart, P., Seguin, R., Einsele, F., Hoex, B., Van De Sanden, M.C.M., Kessels, W.M.M.
Published 2014