Measurement and error analysis of Cu film thickness with Ta barrier layer on wafer for CMP application

by Qu, Zilian, Wang, Wensong, Li, Xueli, Li, Qi, Zheng, Yuanjin
Published 2022

High-precision resistivity measurement of silicon wafer under unstable lift-off distance using inductive and laser sensors-integrated probe

by Qu, Zilian, Wang, Wensong, Yang, Zhengchun, Bao, Qiwen, Li, Xueli
Published 2024