Measurement and error analysis of Cu film thickness with Ta barrier layer on wafer for CMP application

by Qu, Zilian, Wang, Wensong, Li, Xueli, Li, Qi, Zheng, Yuanjin
Published 2022

High-precision resistivity measurement of silicon wafer under unstable lift-off distance using inductive and laser sensors-integrated probe

by Qu, Zilian, Wang, Wensong, Yang, Zhengchun, Bao, Qiwen, Li, Xueli
Published 2024

Noncontact thickness measurement of Cu film on silicon wafer using magnetic resonance coupling for stress free polishing application

by Qu, Zilian, Wang, Wensong, Yang, Shuhui, Sun, Quqin, Fang, Zhongyuan, Zheng, Yuanjin
Published 2019

Design of broadband phased array antenna at X-band

by Wang, Wensong, Qu, Zilian, Shen, Zhongxiang, Lou, Liheng, Tang, Kai, Zheng, Yuanjin
Published 2018

High-sensitivity signal processing circuit integrated coil antenna sensor toward measurements of the water fraction in the oil-water two-phase flow

by Qu, Zilian, Bao, Qiwen, Yang, Zhengchun, Zhao, Zhenyu, Yang, Qinghai, Yang, Shuhui, Li, Zengrui, Wang, Wensong
Published 2023