Analysis of leakage mechanisms and leakage pathways in intra-level Cu interconnects

by Ngwan, V.C., Zhu, C., Krishnamoorthy, A.
Published 2014

Dependence of leakage mechanisms on dielectric barrier in Cu-SiOC damascene interconnects

by Ngwan, V.C., Zhu, C., Krishnamoorthy, A.
Published 2014

Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects

by Ngwan, V.C., Zhu, C., Krishnamoorthy, A.
Published 2014