Detection of Ge and Si intermixing in Ge/Si using multiwavelength micro-raman spectroscopy

by Yoo, Woo Sik, Kang, Kitaek, Ueda, Takeshi, Ishigaki, Toshikazu, Nishigaki, Hiroshi, Hasuike, Noriyuki, Harima, Hiroshi, Yoshimoto, Masahiro, Tan, Chuan Seng
Published 2015

Characterization of hetero-epitaxial Ge films on Si using multiwavelength micro-raman spectroscopy

by Yoo, Woo Sik, Kang, Kitaek, Ueda, Takeshi, Ishigaki, Toshikazu, Nishigaki, Hiroshi, Hasuike, Noriyuki, Harima, Hiroshi, Yoshimoto, Masahiro, Tan, Chuan Seng
Published 2015