Author Search Results

1

Pulsed laser annealing for the formation of ultra-shallow junctions for nano-scale metal-oxide-semiconductor technologies

Pulsed laser annealing for the formation of ultra-shallow junctions for nano-scale metal-oxide-semiconductor technologies

by Ong, Kuang Kian
Published 2010

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Theses and Dissertations

2

Method for forming a shallow junction region using defect engineering and laser annealing

Method for forming a shallow junction region using defect engineering and laser annealing

by ONG, KUANG KIAN, YEONG, SAI HOOI, PEY, KIN LEONG, CHAN, LAP, CHONG, YUNG FU
Published 2012

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Patent